Excimer Laser Brewster Window, CaF2, UV, UHV

High power gas lasers require maximum optical transmission into UV range.

Design Criteria:

• Helium-leak tight to < 10-6 mbar·l/s
• No birefringence from mechanical clamping forces
• Operating pressure 250 psi
• Max temperature 170°C

Product design for a customer developing semiconductor equipment, USA